Japan Intellectual Property Rights: SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE CLEANING METHOD, AND SUBSTRATE PROCESSING METHOD

Japan, June 16 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE CLEANING METHOD, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-079154

Category (FI): H01L21/304,644@C,H10P52/00@T,H10P70/00,104@C,H10P70/00,108@G,H01L21/304,622@Q,H01L21/304,648@G

Stage: Grant (IP right granted following substantive examination.)

Filing Date: May 13, 2022

Publication Date: Nov. 24, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....