Japan, Feb. 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'STRIPPING METHOD, STRIPPING DEVICE AND STRIPPING SYSTEM.' Other related details are as follows:
Application Number: JP,2021-133172
Category (FI): H01L21/02@B,H01L21/68@N,H10P10/00@A,H10P72/70
Stage: PROBLEM TO BE SOLVED: To provide a technique that can improve the efficiency of peeling treatment.SOLUTION: A peeling method according to an aspect of the present disclosure includes the steps of holding and peeling. The holding step holds a polymerized substrate in which a first substrate and a second substrate are joined. In the peeling step, the first substrate is peeled from the polymerized substrate starting from the side surface of the polymerized substrate. ...