Japan, Sept. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'STATIC ELIMINATION STATE DISPLAY METHOD, SUBSTRATE PROCESSING DEVICE, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2023-035568
Category (FI): H10P50/20,101@G,H10P72/72,C23C16/458,H01L21/302,101@G,H01L21/68@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 8, 2023
Publication Date: Feb. 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....