Japan, Sept. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'STATIC ELIMINATION STATE DISPLAY METHOD, SUBSTRATE PROCESSING DEVICE, AND PROGRAM.' Other related details are as follows:

Application Number: JP,2023-035568

Category (FI): H10P50/20,101@G,H10P72/72,C23C16/458,H01L21/302,101@G,H01L21/68@R

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 8, 2023

Publication Date: Feb. 15, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....