Japan, Aug. 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'STAGE, INSPECTION DEVICE, AND STAGE OPERATING METHOD.' Other related details are as follows:
Application Number: JP,2022-111352
Category (FI): H10P72/50@K,H01L21/68@K
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 11, 2022
Publication Date: April 11, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....