Japan, Oct. 5 -- SAMSUNG DISPLAY CO LTD has got intellectual property rights for 'SPUTTERING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-022414
Category (FI): C23C14/34@C,C23C14/35
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 16, 2022
Publication Date: Feb. 9, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....