Japan, Sept. 28 -- ULVAC JAPAN LTD has got intellectual property rights for 'SPUTTERING APPARATUS.' Other related details are as follows:
Application Number: JP,2024-152703
Category (FI): C23C14/00@B,C23C14/35@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 4, 2024
Publication Date: March 16
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....