Japan, Oct. 7 -- NGK INSULATORS LTD has got intellectual property rights for 'SEMICONDUCTOR MANUFACTURING EQUIPMENT MEMBER AND REGENERATION METHOD THEREOF.' Other related details are as follows:
Application Number: JP,2024-055224
Category (FI): C23C16/458,H01L21/302,101@G,C23C14/50@A,H10P72/72,H10P72/70,H10P50/20,101@G,H01L21/68@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 29, 2024
Publication Date: Oct. 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....