Japan, Oct. 23 -- HUABANG ELECTRONIC CO LTD has got intellectual property rights for 'SEMICONDUCTOR MANUFACTURING APPARATUS AND PARAMETER ADJUSTMENT METHOD THEREOF.' Other related details are as follows:
Application Number: JP,2024-153700
Category (FI): H01L21/02@Z,H10P95/00,102@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 6, 2024
Publication Date: March 18
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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