Japan, Aug. 18 -- SHINKAWA LTD has got intellectual property rights for 'SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2022-140936
Category (FI): H10P58/00@Y,H10W72/30@F,H10P72/00@E,H01L21/68@E,H01L21/52@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 5, 2022
Publication Date: March 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....