Japan Intellectual Property Rights: SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION

Japan, Sept. 16 -- ASM IP HOLDING BV has got intellectual property rights for 'SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION.' Other related details are as follows:

Application Number: JP,2024-196026

Category (FI): C23C16/40,H10P14/694,H10P14/692,H10P14/694@B,H10P14/692@X,H01L21/318@B,H01L21/316@X,C23C16/34,C23C16/455,C23C16/04

Stage: PROBLEM TO BE SOLVED: To provide a selective deposition method high in selectivity.SOLUTION: A method comprises: selectively depositing a material on a first surface of a base material to a second surface of a different material composition; selectively forming an inhibitor, such as a polyimide layer from a gas phase reaction substance on the first surface to the second surface; selectively depositing a ta...