Japan Intellectual Property Rights: RF REFERENCE MEASUREMENT CIRCUIT FOR DIRECT DRIVE SYSTEM THAT SUPPLIES POWER TO GENERATE PLASMA IN SUBSTRATE PROCESSING SYSTEM

Japan, July 31 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'RF REFERENCE MEASUREMENT CIRCUIT FOR DIRECT DRIVE SYSTEM THAT SUPPLIES POWER TO GENERATE PLASMA IN SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2025-073032

Category (FI): H10P50/20,101@C,H05H1/46@L,H03H7/40,H01L21/302,101@C,H05H1/46@R

Stage: Grant (IP right granted following substantive examination.)

Filing Date: April 25, 2025

Publication Date: July 30, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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