Japan, May 18 -- TOKYO OHKA KOGYO CO LTD has got intellectual property rights for 'RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD.' Other related details are as follows:
Application Number: JP,2022-093920
Category (FI): G03F7/039,601,G03F7/20,521,C08F20/10,G03F7/004,503@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 9, 2022
Publication Date: Dec. 27, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....