Japan Intellectual Property Rights: REPLACEMENT LIQUID OF LIQUID FILLING BETWEEN RESIST PATTERNS, AND METHOD FOR PRODUCING RESIST PATTERNS USING THE SAME

Japan, Sept. 14 -- MERCK PATENT GMBH has got intellectual property rights for 'REPLACEMENT LIQUID OF LIQUID FILLING BETWEEN RESIST PATTERNS, AND METHOD FOR PRODUCING RESIST PATTERNS USING THE SAME.' Other related details are as follows:

Application Number: JP,2025-075386

Category (FI): G03F7/20,521,G03F7/20,501,G03F7/32,501

Stage: Grant (IP right granted following substantive examination.)

Filing Date: April 30, 2025

Publication Date: Aug. 5, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....