Japan, Nov. 12 -- NANOLBA CO LTD,KEITEKKU KK has got intellectual property rights for 'REMOVAL METHOD FOR LAMINATE ON INTERMEDIATE DISCHARGE SILICON WAFER SURFACE.' Other related details are as follows:
Application Number: JP,2022-168275
Category (FI): H01L21/304,601@S,B24C11/00@D,B24C1/00@Z,H10P95/60@S
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 20, 2022
Publication Date: May 15, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....