Japan, April 22 -- ASM IP HOLDING BV has got intellectual property rights for 'REACTOR SYSTEM WITH MULTI-DIRECTIONAL REACTION CHAMBER.' Other related details are as follows:
Application Number: JP,2021-018173
Category (FI): H10P14/60,101@B,H10P72/30@A,H01L21/31@B,C23C16/54,B01J19/00,321
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 8, 2021
Publication Date: Sept. 2, 2021
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....