Japan Intellectual Property Rights: PROTECTION MEMBER FORMING DEVICE

Japan, July 14 -- DISCO CORP has got intellectual property rights for 'PROTECTION MEMBER FORMING DEVICE.' Other related details are as follows:

Application Number: JP,2022-160231

Category (FI): H10P52/00@S,H10P72/70,H10P52/00@T,H10P52/00@M,H10P52/00@C,B24B41/06@L,H01L21/68@N,H01L21/304,631,H01L21/304,622@J,H01L21/304,622@P

Stage: PROBLEM TO BE SOLVED: To provide a protection member forming device capable of satisfactorily implementing cleaning of a glass table.SOLUTION: A liquid-state resin (M) is supplied onto a mounting surface (161) of a glass table (16) by a resin supply nozzle (183), a wafer holding part (20) is move downward by a lift mechanism (21), and the liquid-state resin is spread over the entire mounting surface of the glass...