Japan Intellectual Property Rights: PROCESSING DEVICE UNIT

Japan, March 5 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'PROCESSING DEVICE UNIT.' Other related details are as follows:

Application Number: JP,2022-098906

Category (FI): H10P58/00@B,H10P58/00@F,B23Q1/00@U,B24B41/06@L,B24B41/02,B23K26/53,H01L21/78@B,H01L21/78@F,B23Q1/01@G

Stage: PROBLEM TO BE SOLVED: To reduce vibration transmitted from a suction device to a processing device when the suction device is disposed in the processing device such as a grinding device.SOLUTION: A processing device unit includes: a processing device including a chuck table which suctions and holds a workpiece, and a processing unit which processes the workpiece suctioned and held by the chuck table; a suction device which supplies a neg...