Japan, Oct. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PROCESSING DEVICE AND TEMPERATURE ADJUSTMENT METHOD.' Other related details are as follows:
Application Number: JP,2023-001181
Category (FI): H01L21/22,511@A,H10P32/00,201@A,H01L21/31@B,H10P14/60,101@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 6, 2023
Publication Date: Oct. 17, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....