Japan, March 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'POWER SOURCE AND INSPECTION DEVICE.' Other related details are as follows:
Application Number: JP,2020-204189
Category (FI): H01L21/66@B,H01L21/66@H,H10P74/00@B,H10P74/00@H
Stage: Grant (IP right document published.)
Filing Date: Dec. 9, 2020
Publication Date: June 21, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....