Japan Intellectual Property Rights: POSITION ADJUSTMENT METHOD AND MANUFACTURING METHOD OF PROCESSING SUBSTRATE

Japan, July 27 -- EBARA CORP has got intellectual property rights for 'POSITION ADJUSTMENT METHOD AND MANUFACTURING METHOD OF PROCESSING SUBSTRATE.' Other related details are as follows:

Application Number: JP,2022-175470

Category (FI): H01L21/68@G,B23Q7/04@C,B23Q17/22@Z,B24B41/06@A,B24B47/22,B24B49/10,B24B49/12,H01L21/68@A,H10P72/50@G,H10P72/30@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 1, 2022

Publication Date: May 15, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....