Japan, Sept. 14 -- EBARA CORP has got intellectual property rights for 'POLISHING DEVICE.' Other related details are as follows:
Application Number: JP,2022-210985
Category (FI): H01L21/304,622@S,B24B49/12,H10P52/00@Z,H10P52/00@V,B24B37/013,H10P52/40
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 27, 2022
Publication Date: July 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....