Japan, March 26 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-196758
Category (FI): H01L21/302,105@A,H10P50/20,105@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 3, 2021
Publication Date: June 15, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....