Japan, July 1 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-124220
Category (FI): H10P14/60,101@C,H10P14/24,C23C16/509,H01L21/31@C,H01L21/205,H05H1/46@M
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 3, 2022
Publication Date: Feb. 16, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....