Japan, March 26 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-134044
Category (FI): H01L21/302,101@B,H05H1/46@M,H10P50/20,101@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 25, 2022
Publication Date: March 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....