Japan, Feb. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND POWER SUPPLY SYSTEM.' Other related details are as follows:
Application Number: JP,2024-138389
Category (FI): H01L21/302,101@C,H01L21/302,105@A,H05H1/46@R,H10P50/20,101@C,H10P50/20,105@A,H10P50/24
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 20, 2024
Publication Date: Nov. 6, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....