Japan, June 16 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-116593
Category (FI): H05H1/46@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 21, 2022
Publication Date: Feb. 1, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....