Japan, Feb. 24 -- PANASONIC IP MANAGEMENT CORP has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND METHOD FOR USING PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-194145
Category (FI): H01L21/31@C,H01L21/302,101@C,H05H1/46@L,H10P14/60,101@C,C23C16/505,C23C16/455,H10P50/20,101@C
Stage: PROBLEM TO BE SOLVED: To control an electron density distribution and a radical density distribution in a chamber.SOLUTION: A plasma processing apparatus 10 disclosed includes a chamber 11, a stage 12, a dielectric member 13, a cover 14, a gas introduction path 15, and an induction coil 16. The induction coil 16 includes a first induction coil 17 installed so as to overlap a central regi...