Japan Intellectual Property Rights: PLASMA PROCESSING APPARATUS AND CLEANING METHOD

Japan, Sept. 9 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND CLEANING METHOD.' Other related details are as follows:

Application Number: JP,2022-195120

Category (FI): H10P50/20,101@H,H10P50/20,101@C,H05H1/46@L,C23C16/44@B,H10P14/60,101@C,H10P14/60,101@Z,H01L21/302,101@H,H01L21/31@C,H01L21/31,H01L21/302,101@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 6, 2022

Publication Date: June 18, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....