Japan, July 1 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'PELLICLE FRAME, PELLICLE, PHOTOMASK WITH PELLICLE, EXPOSURE METHOD, SEMICONDUCTOR MANUFACTURING METHOD, AND LIQUID CRYSTAL DISPLAY MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2023-138970
Category (FI): G03F1/64
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 29, 2023
Publication Date: Nov. 2, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....