Japan, Oct. 5 -- KOREA ELECTRONICS TECHNOLOGY INST has got intellectual property rights for 'PELLICLE FOR EXTREME ULTRAVIOLET LITHOGRAPHY BASED ON METAL CARBIDE NANOTUBES AND METHOD FOR MANUFACTURING THE SAME.' Other related details are as follows:
Application Number: JP,2024-219747
Category (FI): G03F1/22,G03F1/62
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 16, 2024
Publication Date: July 14, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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