Japan, Nov. 10 -- ASAHI KASEI CORP has got intellectual property rights for 'PELLICLE FOR EUV LITHOGRAPHY.' Other related details are as follows:
Application Number: JP,2021-181241
Category (FI): G03F1/64
Stage: Grant (IP right document published.)
Filing Date: Nov. 5, 2021
Publication Date: May 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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