Japan, March 25 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'PELLICLE, EXPOSURE ORIGINAL PLATE WITH PELLICLE, EXPOSURE METHOD AND METHOD FOR PRODUCING SEMICONDUCTOR.' Other related details are as follows:

Application Number: JP,2024-106275

Category (FI): G03F7/20,521,G03F1/62

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 1, 2024

Publication Date: Sept. 3, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....