Japan, March 25 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'PELLICLE, EXPOSURE ORIGINAL PLATE WITH PELLICLE, EXPOSURE METHOD AND METHOD FOR PRODUCING SEMICONDUCTOR.' Other related details are as follows:
Application Number: JP,2024-106275
Category (FI): G03F7/20,521,G03F1/62
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 1, 2024
Publication Date: Sept. 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....