Japan, Aug. 14 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'OPTICAL SYSTEM FOR METROLOGY SYSTEM, AND METROLOGY SYSTEM WITH SUCH OPTICAL SYSTEM.' Other related details are as follows:

Application Number: JP,2024-074683

Category (FI): G01N21/956@A,G03F1/84

Stage: Grant (IP right granted following substantive examination.)

Filing Date: May 2, 2024

Publication Date: Dec. 10, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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