Japan, Sept. 3 -- KLA CORP has got intellectual property rights for 'OPTICAL INSPECTION APPARATUS AND METROLOGY METHOD.' Other related details are as follows:
Application Number: JP,2025-060950
Category (FI): H01L21/66@J,H10P74/20@J,G03F7/20,521,G01B11/00@H
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 2, 2025
Publication Date: June 26, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....