Japan, March 27 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'ONIUM SALT, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND RESIST PATTERN FORMING PROCESS.' Other related details are as follows:
Application Number: JP,2023-009212
Category (FI): C07C25/02,C07C309/43,C07C309/73,C07C381/12,C07D327/08,G03F7/004,503@A,G03F7/039,601
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 25, 2023
Publication Date: Aug. 6, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....