Japan Intellectual Property Rights: MULTIPLE CHARGED PARTICLE BEAM DRAWING METHOD AND MULTIPLE CHARGED PARTICLE BEAM DRAWING APPARATUS

Japan, July 1 -- NUFLARE TECHNOLOGY INC has got intellectual property rights for 'MULTIPLE CHARGED PARTICLE BEAM DRAWING METHOD AND MULTIPLE CHARGED PARTICLE BEAM DRAWING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-103875

Category (FI): H01J37/305@B,H10P76/00,541@W,H01L21/30,541@W,H01L21/30,541@D,H10P76/00,541@D

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 28, 2022

Publication Date: Jan. 16, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....