Japan, Oct. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'MOUNT TABLE AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-163291

Category (FI): H01L21/285@S,H10P72/72,H10P14/45,H02N13/00@D,H01L21/68@R,C23C14/34@K,C23C14/50@E

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Oct. 11, 2022

Publication Date: April 23, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....