Japan, Aug. 6 -- DISCO CORP has got intellectual property rights for 'METHOD FOR REMOVING POLISHING PAD.' Other related details are as follows:
Application Number: JP,2022-193326
Category (FI): H10P52/00@D,H01L21/304,622@F,B24B7/04@A,B24B45/00@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 2, 2022
Publication Date: June 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....