Japan Intellectual Property Rights: METHOD FOR PREPARING CERIA NANOPARTICLES FOR SEMICONDUCTOR CMP PROCESS USING SOLID PHASE METHOD

Japan, Sept. 18 -- UNIV HANNAM INST IND ACAD COOP FOUND has got intellectual property rights for 'METHOD FOR PREPARING CERIA NANOPARTICLES FOR SEMICONDUCTOR CMP PROCESS USING SOLID PHASE METHOD.' Other related details are as follows:

Application Number: JP,2024-228533

Category (FI): H10P52/00@F,C01F17/235,H01L21/304,622@B,C09K3/14,550@D,H10P52/40,H10P52/00

Stage: PROBLEM TO BE SOLVED: The present invention relates to a method for preparing ceria nanoparticles.SOLUTION: The present invention relates to a method for preparing ceria nanoparticles, comprising the steps of: (a) preparing a ceria precursor; (b) heat-treating the ceria precursor to prepare rod-shaped ceria nanoparticles; and (c) pulverizing the ceria nanoparticles.SELECTED DRAW...