Japan, June 16 -- TOKYO OHKA KOGYO CO LTD has got intellectual property rights for 'METHOD FOR MANUFACTURING TREATED SUBSTRATE, METHOD FOR TREATING SUBSTRATE, METHOD FOR FORMING PATTERN, AND CLEANING LIQUID.' Other related details are as follows:
Application Number: JP,2022-186637
Category (FI): H01L21/318@B,C23C16/04,H10P70/00,107@A,H01L21/304,647@A,H01L21/316@X,H10P14/692@X,H10P14/694@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 22, 2022
Publication Date: June 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....