Japan Intellectual Property Rights: METHOD FOR INSPECTING WORKPIECE, METHOD FOR PROCESSING WORKPIECE, AND PLASMA PROCESSING APPARATUS

Japan, Sept. 28 -- DISCO CORP has got intellectual property rights for 'METHOD FOR INSPECTING WORKPIECE, METHOD FOR PROCESSING WORKPIECE, AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2023-010221

Category (FI): H01L21/78@L,H10P58/00@L,H10P50/28,H10P50/26,H10P50/24,H10P50/20,105@Z,H10P50/20,101@B,H05H1/46@M,H05H1/46@R,H01L21/302,101@B,H01L21/302,105@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 26, 2023

Publication Date: Aug. 7, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....