Japan, Nov. 12 -- ASM IP HOLDING BV has got intellectual property rights for 'METHOD FOR FORMING TRANSITION METAL-CONTAINING FILM ON SUBSTRATE BY PERIODIC DEPOSITION PROCESS.' Other related details are as follows:
Application Number: JP,2020-000738
Category (FI): H01L21/285@C,H10P14/43,C23C16/34
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 7, 2020
Publication Date: July 30, 2020
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....