Japan, Feb. 18 -- EGTM CO LTD has got intellectual property rights for 'METHOD FOR FORMING THIN FILM USING CHEMICAL PURGE SUBSTANCE.' Other related details are as follows:
Application Number: JP,2023-199212
Category (FI): C23C16/34,C23C16/455
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 24, 2023
Publication Date: June 5, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....