Japan, Feb. 18 -- EGTM CO LTD has got intellectual property rights for 'METHOD FOR FORMING THIN FILM USING CHEMICAL PURGE SUBSTANCE.' Other related details are as follows:

Application Number: JP,2023-199212

Category (FI): C23C16/34,C23C16/455

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 24, 2023

Publication Date: June 5, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....