Japan, Aug. 24 -- CANON INC has got intellectual property rights for 'METHOD FOR DIAGNOSING FAILURE PORTION OF CONTROL DEVICE, DIAGNOSTIC DEVICE, CONTROL DEVICE, LITHOGRAPHY DEVICE, METHOD FOR MANUFACTURING ARTICLE AND PROGRAM.' Other related details are as follows:
Application Number: JP,2022-083264
Category (FI): G05B23/02,302@Y,G03F7/20,501,G03F7/20,521,G05B23/02,302@T
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 20, 2022
Publication Date: Dec. 1, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....