Japan, Aug. 6 -- EBARA CORP,TOKAI NATIONAL HIGHER EDUCATION & RESEARCH SYSTEM has got intellectual property rights for 'METHOD FOR DEPOSITING PROTECTIVE FILM IN OUTER PERIPHERAL PART OF SUBSTRATE INCLUDING BEVEL PORTION.' Other related details are as follows:
Application Number: JP,2023-090817
Category (FI): C23C16/27,C23C16/42,C23C16/50,H10P14/60,101@C,C23C16/26,H01L21/31@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 1, 2023
Publication Date: Dec. 12, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....