Japan, Sept. 3 -- JAPAN ORGANO CO LTD has got intellectual property rights for 'METHOD AND SYSTEM FOR RECYCLING REACTIVE GAS.' Other related details are as follows:

Application Number: JP,2024-103416

Category (FI): H01L21/302,101@H,C23C16/44@E,H10P14/24,H10P50/20,101@G,H10P50/20,101@H,H01L21/302,101@G,H01L21/205

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 26, 2024

Publication Date: Jan. 15

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....