Japan Intellectual Property Rights: METHOD AND DEVICE FOR DETERMINING ALIGNMENT OF PHOTOMASK ON SAMPLE STAGE WHICH IS DISPLACEABLE ALONG AT LEAST ONE AXIS AND ROTATABLE ABOUT AT LEAST ONE AXIS

Japan, Aug. 14 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'METHOD AND DEVICE FOR DETERMINING ALIGNMENT OF PHOTOMASK ON SAMPLE STAGE WHICH IS DISPLACEABLE ALONG AT LEAST ONE AXIS AND ROTATABLE ABOUT AT LEAST ONE AXIS.' Other related details are as follows:

Application Number: JP,2024-141100

Category (FI): G03F7/20,501,G03F1/72,G03F7/20,521

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Aug. 22, 2024

Publication Date: Dec. 24, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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